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Electrochemical pyrolytic carbon resonators for mass sensing on electrodeposited polymers
Long Nguyen Quang
Arnab Halder
Babak Rezaei
Peter Emil Larsen
Yi Sun
Anja Boisen
Stephan Sylvest Keller
Electro deposition
MEMS resonators
Pyrolytic carbon
Mass sensing
Elsevier
Micro and Nano Engineering, 2 (2019) 64-69. doi:10.1016/j.mne.2019.01.001
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